Developer recycling technology in LCD manufacturing

被引：0
|
作者：
Kikukawa, Makoto [1 ]
机构：
[1] Nagase CMS Technol Co LTD, Tsuzuki Ku, Kanagawa 2240037, Japan
来源：
IDW '06: PROCEEDINGS OF THE 13TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3 | 2006年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recently, the membrane separation technology applied as a recycling technology of the TMAH developer usage in the TFT-LCD manufacturing. Also, we are developing the complete Recycling from waste of the TMAE developer. However, there are a lot of problems to the recycling technology that the accelerated requirements for larger substrate sizes and high-resolution in the LCD industry during the past several years. In order to reduce waste in the photolithography process as well as the global environmental load, we think that it is necessary to cooperate with the LCD manufacturers and the photo-resist manufacturers and the developer manufacturers the development system manufacturers and us.
引用
收藏
页码：893 / 896
页数：4
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