Deformation behaviors of InP pillars under uniaxial compression

被引:31
|
作者
Jian, Sheng-Rui [1 ]
Sung, T. -H. [2 ]
Huang, J. C. [2 ]
Juang, Jenh-Yih [3 ]
机构
[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Mat & Optoelect Sci, Kaohsiung 804, Taiwan
[3] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 300, Taiwan
关键词
SPHERICAL INDENTATION; ROOM-TEMPERATURE; GAAS; TRANSITION;
D O I
10.1063/1.4758479
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the deformation behavior of single-crystal InP(100) micropillars, measuring about 1 mu m in diameter and 2 mu m in height, subjected to uniaxial compression at room temperature. The engineering stress-strain results indicated that the yield strength of InP pillar is about 2.5 GPa, and the presence of a drastic strain burst right after yielding. Cross-sectional transmission electron microscopy microstructural observations reveal the formation of extremely dense twins. The results indicate that the plastic deformation in InP micropillars is dominated by explosive generation of deformation twins under the high stress state. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4758479]
引用
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页数:4
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