Study of Valveless MicroPump Based on MEMS Technology

Structure and work principle of micro pump developed with shape memory alloy (SMA) materials are introduced. The math model is established to analyze the basic performance parameters. The pressure distributions of the diffuser and the nozzle of valve-less micro-pump were analyzed theoretically,the basic flow equations were obtained.The finite element method was applied to calculate the velocity and pressure fields of the diffuser and the nozzle numerically,and the factors which influences the flow characteristic of the valve-less micro-pump were investigated. Simulating the actuator deformations of the micro pump, The feasibility of the operation principle and design method of the valveless Pump driven by the SMA actuator has been Proved by the analysis and test results.The result shows that the micro pump based on SMA materials has some advantages of fast response, large flex displacement and high control precision,etc.