Displacement measurement using a laser feedback grating interferometer

被引：19

作者：

Guo, Dongmei ^{[1
]}

Wang, Ming ^{[1
]}

Hao, Hui ^{[1
]}

机构：

[1] Nanjing Normal Univ, Jiangsu Key Lab Optoelect Technol, Sch Phys Sci & Technol, Nanjing 210023, Jiangsu, Peoples R China

来源：

APPLIED OPTICS | 2015年 / 54卷 / 31期

基金：

中国国家自然科学基金;

关键词：

Funding. National Natural Science Foundation of China (NSFC) (51405240); Natural Science Foundation of Jiangsu Province of China (BK20140925); Program of Natural Science Research of Jiangsu Higher Education Institutions of China (14KJB510015);

D O I：

10.1364/AO.54.009320

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel laser feedback grating interferometer (LFGI) with a phase-generated carrier demodulation technique is proposed in this paper. Laser feedback grating interference occurs when light emitted from a laser is diffracted by the double-diffraction system and re-enters the laser active cavity, thus generating a modulation of the lasing field. In order to improve the displacement measurement resolution, phase modulation is introduced by an electro-optic modulator in the external cavity of the LFGI. Detection of the displacement can be easily achieved by the time-domain orthogonal demodulation, which does not involve any complicated calculation and is insensitive to the sampling error. Experimental results show that the proposed system has a general nanometer-level resolution. It provides a potential displacement sensor with high resolution, simple mechanical structure, and good reliability. (C) 2015 Optical Society of America

引用

页码：9320 / 9325

页数：6

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