Two-Wavelength Multi-Gigahertz Frequency Comb-Based Interferometry for Full-Field Profilometry

被引：6
|
作者：
Choi, Samuel [1 ]
Kashiwagi, Ken [2 ]
Kojima, Shuto [2 ]
Kasuya, Yosuke [2 ]
Kurokawa, Takashi [2 ]
机构：
[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan
[2] Tokyo Univ Agr & Technol, Grad Sch Engn, Koganei, Tokyo 1848588, Japan
来源：
APPLIED PHYSICS EXPRESS | 2013年 / 6卷 / 10期
基金：
日本学术振兴会;
关键词：
FIZEAU INTERFEROMETER; ULTRAHIGH-RESOLUTION; SURFACE; TIME;
D O I：
10.7567/APEX.6.106601
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The multi-gigahertz frequency comb-based interferometer exhibits only the interference amplitude peak without the phase fringes, which can produce a rapid axial scan for full-field profilometry and tomography. Despite huge technical advantages, there remain problems that the interference intensity undulations occurred depending on the interference phase. To avoid such problems, we propose a compensation technique of the interference signals using two frequency combs with slightly varied center wavelengths. The compensated full-field surface profile measurements of cover glass and onion skin were demonstrated experimentally to verify the advantages of the proposed method. (C) 2013 The Japan Society of Applied Physics
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页数：4
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