A research of a high precision multi-channel data acquisition system

The output signals of the focusing system in lithography are analog. To convert the analog signals into digital ones which are more flexible and stable to process, a desirable data acquisition system is required. The resolution of data acquisition, to some extent, affects the accuracy of focusing. In this article, we first compared performance between the various kinds of analog-to-digital converters (ADC) available on the market at the moment. Combined with the specific requirements (sampling frequency, converting accuracy, numbers of channels etc) and the characteristics (polarization, amplitude range etc) of the analog signals, the model of the ADC to be used as the core chip in our hardware design was determined. On this basis, we chose other chips needed in the hardware circuit that would well match with ADC, then the overall hardware design was obtained. Validation of our data acquisition system was verified through experiments and it can be demonstrated that the system can effectively realize the high resolution conversion of the multi-channel analog signals and give the accurate focusing information in lithography.