Determination of Ultimate Leakage Through Rutile TiO2 and Tetragonal ZrO2 From Ab Initio Complex Band Calculations

被引：6

作者：

Clima, Sergiu ^{[1
]}

Kaczer, B. ^{[1
]}

Govoreanu, B. ^{[1
]}

Popovici, M. ^{[1
]}

Swerts, J. ^{[1
]}

Verhulst, A. S. ^{[1
]}

Jurczak, M. ^{[1
]}

De Gendt, S. ^{[1
,2
]}

Pourtois, G. ^{[1
,3
]}

机构：

[1] IMEC, B-3001 Louvain, Belgium

[2] Katholieke Univ Leuven, B-3000 Louvain, Belgium

[3] Univ Antwerp, BE-2000 Antwerp, Belgium

来源：

IEEE ELECTRON DEVICE LETTERS | 2013年 / 34卷 / 03期

关键词：

Imaginary bands; TiO2; tunneling effective mass; ZrO2;

D O I：

10.1109/LED.2013.2238885

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

First-principle complex band structures have been computed for rutile TiO2 and tetragonal ZrO2 insulating materials that are of current technological relevance to dynamic random accessmemorymetal-insulator-metal (MIM) capacitors. From the magnitude of the complex wave vectors in different orientations, the most penetrating orientations have been identified. Tunneling effective masses m(tunnel) have been extracted, are shown to be a crucial parameter for the intrinsic leakage, and are identified to be an important parameter in further scaling of MIM capacitors.

引用

页码：402 / 404

页数：3

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