3D push-pull heterodyne interferometer for SPM metrology

被引：5

作者：

Kazieva, T., V ^{[1
]}

Gubskiy, K. L. ^{[1
]}

Kuznetsov, A. P. ^{[1
]}

Reshetov, V. N. ^{[1
]}

机构：

[1] Natl Res Nucl Univ MEPhI, Moscow Engn Phys Inst, Moscow 115409, Russia

来源：

APPLIED OPTICS | 2019年 / 58卷 / 15期

基金：

俄罗斯科学基金会;

关键词：

Calibration gratings - Characteristics of dynamics - Heterodyne interferometer - Heterodyne laser interferometers - Measurement uncertainty - Metrological characteristics - Physikalisch-technische bundesanstalt - Subnanometer resolution;

D O I：

10.1364/AO.58.004000

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A three-coordinate heterodyne laser interferometer has been developed to measure the displacement of the probe microscope scanner with a subnanometer resolution that provides traceability of measurements to the standard of meter through the wavelength of a stabilized He-Ne laser. Main sources of errors are investigated, and their influence is minimized so that the resulting measurement uncertainty of the system does not exceed 0.2 nm, and the resolution is 0.01 nm. The investigation of metrological characteristics of the three-coordinate interferometer was carried out with a scanning probe microscopy (SPM) NanoScan-3D using TGZ-type calibration gratings. The values measured with SPM fell within the 95% confidence interval given by Physikalisch-Technisc.he Bundesanstalt (PTB) (Germany). SPM equipped with a laser interferometer was used to measure the characteristics of dynamic etalons of geometric dimensions. (C) 2019 Optical Society of America

引用

页码：4000 / 4006

页数：7

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