On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects

被引：105
|
作者：
Ma, Z. S. [1 ,2 ]
Zhou, Y. C. [1 ,2 ]
Long, S. G. [1 ,2 ]
Lu, C. [3 ]
机构：
[1] Xiangtan Univ, Minist Educ, Key Lab Low Dimens Mat & Applicat Technol, Xiangtan 411105, Hunan, Peoples R China
[2] Xiangtan Univ, Fac Mat Optoelect & Phys, Xiangtan 411105, Hunan, Peoples R China
[3] Curtin Univ, Dept Mech Engn, Perth, WA 6845, Australia
来源：
INTERNATIONAL JOURNAL OF PLASTICITY | 2012年 / 34卷
基金：
澳大利亚研究理事会; 中国国家自然科学基金;
关键词：
Indentation; Strain gradient effect; Substrate effect; Film/substrate system; Hardness; STRAIN GRADIENT PLASTICITY; THIN-FILMS; MECHANICAL-PROPERTIES; NANO-INDENTATION; DEPENDENT NANOINDENTATION; TIP RADIUS; DEFORMATION; SCALE; THICKNESS; STRENGTH;
D O I：
10.1016/j.ijplas.2012.01.001
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin films, which allows a more accurate fitting to empirical data and the estimation of ultimate film hardness. The model can be used to interpret indentation data and extrapolate the indentation depth-hardness curve to an important region where indentation depth lies between 1% to 5 times of film thickness. The results are well consistent with the evolving trend of composite hardness obtained from experiments and numerical results by finite element analysis. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved.
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页码：1 / 11
页数：11
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