Design and Fabrication of IDT Surface Acoustic Wave Device For Biosensor Application

被引：1

作者：

Zakaria, Mohd Rosydi ^{[1
]}

Shamsuddin, Mohd A. Farhi ^{[1
]}

Hashim, Uda ^{[2
]}

Adam, Tijjani ^{[2
]}

Al-mufti, Abdulmohaimen Wesam ^{[2
]}

机构：

[1] Univ Malaysia Perlis, Sch Microelect Engn, Arau, Perlis, Malaysia

[2] Univ Malaysia Perlis, Inst Nano Elect Engn, Kangar, Perlis, Malaysia

来源：

PROCEEDINGS FIFTH INTERNATIONAL CONFERENCE ON INTELLIGENT SYSTEMS, MODELLING AND SIMULATION | 2014年

关键词：

IDT SAW design; Split IDT; SAW device; SAW;

D O I：

10.1109/ISMS.2014.139

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

The Surface Acoustic Wave (SAW) is one of sensor types that can be used in multifunction in the sensing field. Hence, the purpose of this project is to study and investigate the design of SAW device for biosensor application. Several parameters and design has been varied and proposed to investigate the effect to the SAW Biosensor performance. The parameter such as total SAW IDT fingers and Split IDT design has successfully designed using AutoCAD software and fabricated using conventional lithography method. The Aluminum IDT was fabricated on ZnO/Si piezoelectric substrate and show a good result in term of electrical characterization and frequency response. From result, the proposed design with many fingers can increase the center frequency response while the split design control the insertion loss. It shows that these designs are suitable to apply in the SAW biosensor application.

引用

页码：760 / 764

页数：5

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