Effect of atmospheric pressure dielectric barrier discharge air plasma on electrode surface

被引：52
|
作者：
Wang, Changquan [1 ]
He, Xiangning
机构：
[1] Zhejiang Univ, Coll Elect Engn, Hangzhou 310027, Peoples R China
[2] Xuzhou Normal Univ, Inst Technol, Xuzhou 221116, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2006年 / 253卷 / 02期
关键词：
dielectric barrier discharge; electrode; plasma treatment; scanning electron microscope; X-ray energy dispersion spectroscopy;
D O I：
10.1016/j.apsusc.2006.01.032
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In order to study the influence of plasma on electrode, atmospheric pressure dielectric barrier discharge (DBD) air plasma is employed here to treat copper electrode surface. Plasma is generated between the parallel plate electrodes by means of high voltage produced by a high-frequency power supply with transformer. Electrode surface alterations induced by air plasma are investigated by using field emission scanning electron microscope (FE-SEM), X-ray energy dispersion spectroscopy (EDS) and contact angle measurement. The results show that DBD air plasma removes the organic contaminant on surface and causes electrode surface toughness, oxidization and nitridation. In addition, surface wettability is also improved, as concluded from contact angle measurements. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：926 / 929
页数：4
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