Theoretical study of a linear accelerator used as a VUV/X-ray source using the inverse Compton scattering mechanism: Comparisons and applications

A classical linear theory is used to compare large synchrotron sources to a rf linear accelerator employed as a VUV/X-ray source. Comparisons are made on a per-pulse basis. It is demonstrated that the linear accelerator as an X-ray source is comparable to large synchrotron accelerators with wiggler insertion devices at the experiment. Applications to lithography, X-ray microscopy, X-ray spectroscopy and detector calibration are examined. Excluding lithography, the linear accelerator with an appropriate laser source is a useful source of X rays for these applications. As verification, classical results are compared with quantum mechanical results and are shown to be in good agreement.