Optimum Design of a Piezo-Actuated Triaxial Compliant Mechanism for Nanocutting

A novel piezo-actuated compliant mechanism is developed to obtain triaxial translational motions with de-coupled features for nanocutting. Analytical modeling of the working performance followed by Pareto-based multiobjective optimization is conducted for determining dimensions of the mechanism. Finite element analysis on the designed mechanism verifies the accuracy of the developed model, accordingly demonstrating the effectiveness of the optimal design process. Open-loop test on the prototype shows that proper strokes with low coupling and high natural frequencies are obtained as estimated. Low tracking error in closed-loop test suggests that the developed mechanism can precisely follow the desired trajectory to form complicated nanostructures. Finally, closed-loop based nanosculpturing is conducted, demonstrating the effectiveness of the developed triaxial motion system for nanocutting well.