Control of High Quality SrVO3 Electrode in Oxidizing Atmosphere

SrVO3 (SVO) is a model system for strongly correlated oxides and is highly promising as conductive layer in heterostructures. Therefore, the control of electronic properties and morphology are essential for the advanced applications. Here, the oxygen stability during and after the deposition is explored, as SVO film is expected to undergo different postdeposition thermal and atmosphere treatments during its integration in a heterostructure. Hence, the influence of oxygen stability on morphology and electrical properties of the metallic SrVO3 grown by pulsed laser deposition has been investigated. Films grown under vacuum (SrVO3-d) exhibit a very smooth surface while films grown under higher oxygen pressure roughen and present nanostructures at the surface. These nanostructures are found to be of Sr3V2O8 phase and their apparition can be controlled by the oxygen supply. Subsequent thermal treatments at different temperatures under same oxygen pressure prevent formation of the Sr3V2O8 phase, lead to the stoichiometric SrVO3, and thus improve the transport properties. In this study is shown the extreme sensitivity of SVO to oxygen and the conditions to obtain high quality smooth SVO films with improved electrical properties for electrode application.