Ultra Low Power NO2 Gas Sensors Based on Suspended CNFETs

被引：0

作者：

Hierold, Christofer ^{[1
]}

Chikkadi, Kiran ^{[1
]}

Haluska, Miroslav ^{[1
]}

Roman, Cosmin ^{[1
]}

机构：

[1] ETH, Dept Mech & Proc Engn, Micro & Nanosyst, Zurich, Switzerland

来源：

2016 46TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC) | 2016年

关键词：

carbon nanotube field-effect transistors (CNFETs); cross-sensitivity; functionalization; gas sensors; hysteresis; low power; self-heating; single walled carbon nanotubes; CARBON; GROWTH;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The charge carrier transport in carbon nanotubes is highly sensitive to certain molecules attached to their surface. In this invited contribution, we intend to summarize the current knowledge on suspended CNFETs as NO2 sensors. Sensor recovery within minutes through self-heating has been shown. Improvements in fabrication processes aimed at reducing the impact of charge traps have reduced the hysteresis, drift and low-frequency noise in carbon nanotube transistors. While open challenges such as large-scale fabrication still remain, these results demonstrate considerable progress in transforming the promise of carbon nanotube properties into functional ultra-low power, highly sensitive gas sensors.

引用

页码：272 / 275

页数：4

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