Characterization of Dislocation-Based Nanotransistors

被引:0
|
作者
Reiche, Manfred [1 ]
Kittler, Martin [2 ]
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle, Germany
[2] IHP Microelect, D-15236 Frankfurt, Oder, Germany
关键词
SILICON;
D O I
10.1117/12.927401
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Dislocations are native nanowires. The realization of well-defined dislocation networks allows the electrical characterization of only a small number of dislocations. Different types of dislocations were analyzed by integration into the channel of MOSFETs. A substantial increase of the drain current was proved if only a few dislocations are present in the channel of nMOSFETs. Low-temperature measurements indicate single-electron tunneling on dislocation core defects.
引用
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页数:7
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