Sensitivity of Piezoresistive Pressure Sensor with Inner Diaphragm

被引：0

作者：

Hong, Chua Kean ^{[1
]}

Ismail, Noor Faezah ^{[1
]}

Yunus, Nurul Amziah Md ^{[1
]}

Ahmad, Desa ^{[2
]}

机构：

[1] Univ Putra Malaysia, Fac Engn, Dept Elect & Elect Engn, Upm Serdang 43400, Selangor, Malaysia

[2] Univ Putra Malaysia, Fac Engn, Dept Biol & Agr Engn, Serdang 43400, Selangor, Malaysia

来源：

2017 IEEE ASIA PACIFIC CONFERENCE ON POSTGRADUATE RESEARCH IN MICROELECTRONICS AND ELECTRONICS (PRIMEASIA) | 2017年

关键词：

component; Piezoresistive; Pressure Sensor; Sensitivity; COMSOL;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also discussed.

引用

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页码：129 / 132

页数：4

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