2018 Best Paper Award

被引：0

|

作者：

Uzsoy, Reha ^{[1
]}

机构：

[1] North Carolina State Univ, Edward P Fitts Dept Ind & Syst Engn, Raleigh, NC 27695 USA

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2019年 / 32卷 / 02期

关键词：

D O I：

10.1109/TSM.2019.2910984

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：139 / 139

页数：1

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