Structural and optical properties of ZnO films grown by atmospheric-pressure CVD methods using different source materials

被引：1
|
作者：
Terasako, Tomoaki [1 ]
Taira, Keisuke [1 ]
Taniguchi, Kouta [2 ]
Yagi, Masakazu [2 ]
Shirakata, Sho [1 ]
机构：
[1] Ehime Univ, Grad Sch Sci & Engn, 3 Bunkyo Cho, Matsuyama, Ehime 7908577, Japan
[2] Kagawa Natl Coll Technol, Mitoya 7691192, Japan
来源：
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 2 | 2011年 / 8卷 / 02期
关键词：
ZnO; chemical vapor deposition; photoluminescence; bound exciton; ZINC-OXIDE; PHOTOLUMINESCENCE; GREEN;
D O I：
10.1002/pssc.201000389
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Structural and photoluminescence (PL) properties of ZnO films grown by atmospheric pressure CVD methods using the sources of Zn(C5H7O2)(2)H2O (ZnAA) -C2H5OH, ZnCl2-C2H5OH and Zn-H2O, were compared. For the ZnAA-C2H5OH system, the influence of the crystalline imperfection was observed on the XRD pattern and the PL spectrum. RT PL spectrum of the highly c-axis oriented film grown on the a-plane sapphire substrate using ZnCl2-C2H5OH system exhibited a strong green band (GB) emission and a weak near-band-edge (NBE) emission. For the Zn-H2O systems, the c-and a-axis oriented films were successfully grown on the c-and r-plane sapphire substrates, respectively, and their PL spectra were dominated by the NBE emission. For the ZnCl2-C2H5OH system, only the variation of the PL intensity ratio of the GB emission to the NBE emission by changing the supply ratio of C2H5OH to ZnCl2 was observed. For the Zn-H2O system, however, the visible region PL changed from the red to the GB emission systematically by adjusting the supply ratio of H2O to Zn. The Zn-H2O system was found to be the most suitable for the defect control. Low temperature PL measurements revealed that the accurate control of the supply ratio of the O source to the Zn source is an important factor for controlling not only the defects, but also for the concentration of the residual impurities. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码：509 / 511
页数：3
相关论文
共 50 条
  • [1] Comparative study of optical properties of ZnO films and nanorods grown by atmospheric-pressure CVD and chemical bath deposition
    Terasako, Tomoaki
    Ogura, Yoshinori
    Fujimoto, Shohei
    Murakami, Toshihiro
    Yagi, Masakazu
    Shirakata, Sho
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 10, NO 11, 2013, 10 (11): : 1580 - 1583
  • [2] Optical properties of ZnO films grown by atmospheric-pressure chemical vapor deposition using Zn and H2O as source materials
    Terasako, T.
    Yagi, M.
    Ishizaki, M.
    Senda, Y.
    Matsuura, H.
    Shirakata, S.
    THIN SOLID FILMS, 2007, 516 (2-4) : 159 - 164
  • [3] Photoluminescence Properties of Polar and Non-polar ZnO Films Grown by Atmospheric-pressure CVD Using Zn and H2O as Source Materials
    Terasako, T.
    Taniguchi, K.
    Taira, K.
    Yagi, M.
    Shirakata, S.
    EUROCVD 17 / CVD 17, 2009, 25 (08): : 199 - 206
  • [4] Structural and optical properties of CdO nanostructures prepared by atmospheric-pressure CVD
    Terasako, T.
    Fujiwara, T.
    Nakata, Y.
    Yagi, M.
    Shirakata, S.
    THIN SOLID FILMS, 2013, 528 : 237 - 241
  • [5] Possibility of Shape Control of ZnO Nanostructures Grown by Atmospheric-pressure CVD Utilizing Catalytic Materials
    Terasako, Tomoaki
    Saito, Daisuke
    Taira, Keisuke
    Nishinaka, Atsushi
    Yamaguchi, Tomoya
    Shirakata, Sho
    E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2009, 7 : 78 - 83
  • [6] Growth of β-gallium oxide films and nanostructures by atmospheric-pressure CVD using gallium and water as source materials
    Terasako, Tomoaki
    Ichinotani, Hikaru
    Yagi, Masakazu
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 12, NO 7, 2015, 12 (07): : 985 - 988
  • [7] Structural and optical properties of ZnO films grown on ion-plated Ga doped ZnO buffer layers by atmospheric-pressure chemical vapor deposition using Zn and H2O as source materials
    Terasako, Tomoaki
    Ochi, Yohei
    Yagi, Masakazu
    Nomoto, Junichi
    Yamamoto, Tetsuya
    THIN SOLID FILMS, 2018, 663 : 79 - 84
  • [8] Effects of NH3 flow on structural and optical properties of ZnO films grown by atmospheric-pressure chemical vapor deposition
    Terasako, Tomoaki
    Ogura, Yoshinori
    Yagi, Masakazu
    THIN SOLID FILMS, 2019, 675 : 50 - 58
  • [9] Comparisons of structural and optical properties of ZnO films grown on (0001) sapphire and GaN/(0001) sapphire template by atmospheric-pressure MOCVD
    Dai, JN
    Liu, HH
    Fang, WQ
    Wang, L
    Pu, Y
    Jiang, FY
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 127 (2-3): : 280 - 284
  • [10] Effect of oxygen content on the structural and optical properties of ZnO films grown by atmospheric pressure MOCVD
    Sajjad Hussain
    Yaqoob Khan
    Volodymyr Khranovskyy
    Riaz Muhammad
    Rositza Yakimova
    Progress in Natural Science:Materials International, 2013, 23 (01) : 44 - 50
12345