Fabrication of microlens arrays in polycarbonate with nanojoule energy femtosecond laser pulses

被引：0
|
作者：
Meunier, Trevor [1 ]
Weck, Arnaud [1 ]
机构：
[1] Univ Ottawa, Dept Mech Engn, Ottawa, ON K1N 6N5, Canada
来源：
2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2012年
关键词：
ABLATION;
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暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Microlens arrays were fabricated by focusing a high repetition rate femtosecond laser with low energy pulses inside polycarbonate samples. The microlens was imaged in a scanning electron microscope and was optically characterized using a HeNe laser. It was found that the microlens has a diameter of 80 mu m, a focal length of 100 mu m, a numerical apperture of 0.63 and a spot diameter of 1.2 mu m. Additionally, we found that a void is created under the microlens.
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页数：2
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