共 50 条
- [2] Selective Atomic Layer Deposition of TiO2 [J]. 2019 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2019,
- [3] Photocatalysis of Ag-Loaded TiO2 Nanotube Arrays Formed by Atomic Layer Deposition [J]. JOURNAL OF PHYSICAL CHEMISTRY C, 2011, 115 (19): : 9498 - 9502
- [6] Nanostructured TiO2 membranes by atomic layer deposition [J]. JOURNAL OF MATERIALS CHEMISTRY, 2006, 16 (14) : 1355 - 1359
- [9] Atomic layer deposition for TiO2 and TiN nanometer films [J]. MATERIALS TODAY-PROCEEDINGS, 2017, 4 (11) : 11630 - 11639
- [10] Spatial atomic layer deposition of ZnO/TiO2 nanolaminates [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2016, 34 (05):