Parallel microstructuring using femtosecond laser and spatial light modulator

被引：22
|
作者：
Silvennoinen, M. [1 ]
Kaakkunen, J. [2 ]
Paivasaari, K. [1 ]
Vahimaa, P. [1 ]
机构：
[1] Univ Eastern Finland, Dept Math & Phys, POB 111, Joensuu 80101, Finland
[2] VTT Tech Res Ctr Finland, Laser Proc Applicat, Lappeenranta 53851, Finland
来源：
LASERS IN MANUFACTURING (LIM 2013) | 2013年 / 41卷
关键词：
Micromachining; Femtosecond laser; Spatial light modulator;
D O I：
10.1016/j.phpro.2013.03.135
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns. (C) 2013 The Authors. Published by Elsevier B.V.
引用
收藏
页码：686 / 690
页数：5
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