Noncontact determination of thin films conductance by SH0 plate acoustic waves

被引：4
|
作者：
Kuznetsova, I. E. [1 ]
Zaitsev, B. D. [2 ]
Anisimkin, V. I. [1 ]
Teplykh, A. A. [2 ]
Shikhabudinov, A. M. [2 ]
Kolesov, V. V. [1 ]
Yakunin, V. G. [3 ]
机构：
[1] RAS, Inst Radio Engn & Elect, Moscow 125009, Russia
[2] RAS, Inst Radio Engn & Elect, Saratov Branch, Saratov 410019, Russia
[3] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia
来源：
JOURNAL OF APPLIED PHYSICS | 2014年 / 115卷 / 04期
关键词：
PIEZOELECTRIC PLATES; NIOBATE;
D O I：
10.1063/1.4862807
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductance by using shear-horizontal zero order (SH0) acoustic waves in thin piezoelectric plates. The method is based on the registration of changes in velocity and attenuation of acoustic waves in a piezoelectric plate due to placing the structure "film under study-dielectric substrate" on the certain distance from the plate. The limits of measured values by the suggested method are determined. The theoretical data are compared with the experimental results. (C) 2014 AIP Publishing LLC.
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页数：5
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