Experimental investigations into EDM behaviors of single crystal silicon carbide

被引：11

作者：

Zhao, Y. ^{[1
]}

Kunieda, M. ^{[1
]}

Abe, K.

机构：

[1] Univ Tokyo, Bunkyo Ku, Tokyo 1138656, Japan

来源：

PROCEEDINGS OF THE SEVENTEENTH CIRP CONFERENCE ON ELECTRO PHYSICAL AND CHEMICAL MACHINING (ISEM) | 2013年 / 6卷

关键词：

EDM; Single crystal SiC; SiC wafer slicing;

D O I：

10.1016/j.procir.2013.03.064

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The present study aims to investigate the fundamental electrical discharge machining (EDM) characteristics of silicon carbide (SiC) single crystal material. The EDM machining performances of SiC are experimentally studied and compared to that of steel. Die-sinking EDM of SiC by utilizing copper foil electrodes was proposed and investigated. It was found that EDM characteristics of SiC have a big difference from those of steel. The EDM speed of SiC is higher and the tool wear ratio is lower compared to that of steel material, although SiC has a higher thermal conductivity and melting point. Thermal crack caused by the thermal shock of electrical discharges was found as another main factor contributing to the removal of the material in EDM of SiC material. Also it is concluded that the new foil EDM method for slicing SiC ingot has potential for slicing SiC wafers in the future. (C) 2013 The Authors. Published by Elsevier B.V. Selection and/or peer-review under responsibility of Professor Bert Lauwers

引用

页码：135 / 139

页数：5

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