Optical emission spectroscopy of the active species in nitrogen plasma

被引:13
|
作者
Qayyum, A
Zeb, S
Naveed, MA
Ghauri, SA
Waheed, A
Zakaullah, M [1 ]
机构
[1] Quaid I Azam Univ, Dept Phys, Islamabad 45320, Pakistan
[2] Pinstech, Islamabad 44000, Pakistan
来源
PLASMA DEVICES AND OPERATIONS | 2006年 / 14卷 / 01期
关键词
50 Hz pulsed-dc generated nitrogen plasma; plasma-induced optical emission spectroscopy; excited-state population density;
D O I
10.1080/10519990500281659
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
Optical emission spectroscopy is used to study the production of active species in nitrogen plasma excited by a 50 Hz pulsed-dc power source. The emission intensities of the band heads of the second positive (lambda = 337.1 nm; 0-0) and first negative (lambda = 391.4 nm; 0-0) systems are used to investigate the dependence of their radiative states N-2 (C-3 Pi(u)) and N-2(+)(B-2 Sigma(+)(u)) population density on operating parameters. The emission intensity of the N-2(+)(B-2 Sigma(+)(u)) radiative state is used to determine the relative dependence of N-2(+) ion density on operating conditions by considering the fact that, in low-temperature plasmas, the dominant mechanism of the population of N-2(+)(B-2 Sigma(+)(u)) state starts from the ground state N-2(+)(X-2 Sigma(+)(g)) mainly by electron collisions. It is found that the production of these active species has a significant dependence on the discharge parameters and may be optimized under typical operating conditions.
引用
收藏
页码:61 / 70
页数:10
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