Using active thermography for defects inspection of flip chip

被引:23
|
作者
Xu, Zhensong [1 ]
Shi, Tielin [1 ]
Lu, Xiangning [1 ]
Liao, Guanglan [1 ]
机构
[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China
基金
中国国家自然科学基金;
关键词
SCANNING ACOUSTIC MICROSCOPY; PACKAGE; SOLDER;
D O I
10.1016/j.microrel.2013.12.015
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
With the development of electronics towards smaller, more compact, and increasingly complex, flip chip technology has been used extensively in microelectronic packaging, and disadvantages occur in traditional detection methods. It is indispensable to explore new methods for flip chip solder joint inspection. In this paper we investigate an approach for solder joint inspection based on the active thermography. The basic principle of the active thermography method is described, and the experimental investigation is carried out using the method. The test flip chip is heated by a non-contact heating source. The thermal distribution on two kinds of chips is captured by an infrared thermal imager. With median filter and segmentation processes, positions of the bumps are segmented. For chips with smaller bumps, principal component thermography is introduced to enhance the segmentation process. The analysis results demonstrate that missing bumps in flip chips can be discerned obviously, which proves the feasibility of the proposed method for defects inspection of flip chips. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:808 / 815
页数:8
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