Laser writing of periodic nano-structures on solid surfaces

Short und ultrashort pulse UV laser processing of solid surfaces with sub-micron precision is demonstrated. The combination of a short laser wavelength providing strong absorption and high optical resolution and a short pulse duration minimizing heat affected zones enables ultra precise patterns on any solid material. High speed is achieved using parallel processing. Periodic patterns are fabricated utilizing various optimized beam delivery concepts like multilevel diffractive optical elements, phase controlled interference, proximity phase mask method, and two grating interferometer. The respective advantages and the fields of application are discussed.