SURFACE MORPHOLOGY OF AMORPHOUS HYDROCARBON THIN FILMS DEPOSITED IN PULSED RADIOFREQUENCY DISCHARGE

被引：0
|
作者：
Valtr, Miroslav [1 ]
Klapetek, Petr [1 ]
Bursikova, Vilma [2 ]
Ohlidal, Ivan [2 ]
Franta, Daniel [2 ]
机构：
[1] Czech Metrol Inst, Dept Nanometrol, Brno 63800, Czech Republic
[2] Masaryk Univ, Fac Sci, Dept Phys Elect, CS-61137 Brno, Czech Republic
来源：
CHEMICKE LISTY | 2008年 / 102卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：S1529 / S1532
页数：4
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