Cavity-resonator-integrated guided-mode resonance filter in channel waveguide

被引:24
|
作者
Inoue, Junichi [1 ]
Ogura, Tomonori [1 ]
Hatanaka, Koji [1 ]
Kintaka, Kenji [2 ]
Nishio, Kenzo [1 ]
Awatsuji, Yasuhiro [1 ]
Ura, Shogo [1 ]
机构
[1] Kyoto Inst Technol, Dept Elect, Sakyo Ku, Kyoto 6068585, Japan
[2] Natl Inst Adv Ind Sci & Technol, Ikeda, Osaka 5638577, Japan
来源
IEICE ELECTRONICS EXPRESS | 2013年 / 10卷 / 15期
关键词
wavelength filters; optical waveguides; grating couplers; guided-mode resonance; distributed Bragg reflectors; waveguide resonators; GRATING FILTERS; APERTURE;
D O I
10.1587/elex.10.20130444
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A cavity-resonator-integrated guided-mode resonance filter (CRIGF) consisting of a grating coupler and a pair of distributed Bragg reflectors in a channel waveguide is proposed for a narrow-band reflection spectrum with a small aperture. A channel waveguide structure and grating pattern of the device were simultaneously formed by the electron-beam direct-writing lithography. A full-width at half-maximum of reflection spectrum of the fabricated CRIGF was about 0.3 nm with the maximum reflectance of about 30%. A reflection phase varied by almost 2 pi for wavelength change of 1 nm.
引用
收藏
页数:9
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