Effect of annealing on the structural, topographical and optical properties of sol-gel derived ZnO and AZO thin films

被引:77
|
作者
Sengupta, Joydip [1 ]
Sahoo, R. K. [2 ]
Mukherjee, C. D. [3 ]
机构
[1] Sikkim Manipal Inst Technol, Dept Phys, Sikkim 737136, India
[2] Indian Inst Technol, Ctr Mat Sci, Kharagpur 721302, W Bengal, India
[3] Saha Inst Nucl Phys, ECMP Div, Kolkata 700064, W Bengal, India
关键词
AZO thin film; Sol-gel preparation; Annealing; X-ray diffraction; Atomic force microscopy; Optical properties; TRANSPARENT; GROWTH; OXIDES; SI;
D O I
10.1016/j.matlet.2012.05.130
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A comparative study of the physical properties of undoped Zinc Oxide (ZnO) and Al doped Zinc Oxide (AZO) thin films were performed as a function of annealing temperature. The structural properties were analyzed using X-ray diffraction and the recorded patterns indicated that the crystallinity of the films always enhanced with increasing annealing temperature while it degrades with Al doping. The topographical modification of the films due to heat treatment was examined by atomic force microscopy which revealed that annealing roughened the surface of all the films; however the AZO films always exhibited smoother morphology than ZnO. Study of the optical properties by UV-Visible spectrophotometer demonstrated that the transmittance was gradually diminished with the rise in annealing temperature. In addition, a notable increase in the optical band gap was also observed for the AZO films. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:84 / 87
页数:4
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