Specular 3D Shape Measurement with a Compact Fringe Reflection System

The three-dimensional (3D) metrology for specular reflecting surfaces attracted much attention due to their various applications in optics, electronics, or semiconductor industry. Fringe reflection technique is an effective tool to measure the specular surface slopes (gradient information), and then reconstruct the surface shape from gradient. However, most of the fringe reflection systems are built up for middle size (similar to 10,000 mm(2)) or larger size (similar to 100,000 mm(2)) objects by using the off-the-shelf desktop displays. In order to measure samples with smaller size (similar to 200 mm(2)) with higher measuring resolution, a compact fringe reflection system is proposed. The performance of the compact specular 3D shape measurement system is demonstrated with experiments.