A Review of Compliance Design for Semiconductor Fabrication Equipment

被引：0
|
作者：
Chan, George [1 ]
Lee, Chi Chung [2 ]
Wei, Yang [3 ]
Tsang, Kim Fung [3 ]
机构：
[1] ASM Pacific Technol Ltd, Hong Kong, Peoples R China
[2] Hong Kong Metropolitan Univ, Hong Kong, Peoples R China
[3] City Univ Hong Kong, Hong Kong, Peoples R China
来源：
IEEE ISPCE-ASIA 2021: IEEE INTERNATIONAL SYMPOSIUM ON PRODUCT COMPLIANCE ENGINEERING - ASIA | 2021年
关键词：
Compliance Design; Designers; Electromagnetic Compatibility; Risk; Safety; Semiconductor Fabrication Equipment; Manufacturing;
D O I：
10.1109/ISPCE-ASIA53453.2021.9652192
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
In order to fulfill a great demand of IoT and 5G technology, more and more Semiconductor Fabrication Equipment (SFE) have been manufactured. The fastest and most accurate machinery have been launched to the semiconductor industry. Without stringent and smart manufacturing consideration, it would lead the customers' safety risk. This review article introduces the newest European Union (EU) and United States (US) regulatory requirement and propose a detail compliant design rationale for SFE manufacturer. This article is a comprehensive tool for designer to understand the compliance design solution and implementation measures.
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页数：6
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