Beam Homogenization of a Fresnel Lens Array with a Randomly Distributed Phase for Laser Beams

被引:3
|
作者
Pei Xian-zi [1 ]
Liang Yong-hao [2 ]
Wang Fei [1 ]
Zhu Xiao-li [2 ]
Xie Chang-qing [2 ]
机构
[1] Changchun Univ Sci & Technol, Sch Optoelect Engn, Changchun 130022, Jilin, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
关键词
Laser beam homogenization; Single-mode Gaussian beams; Random phase; Fresnel lens array; Interference; MICROLENS ARRAY; DESIGN; SYSTEM; MODEL;
D O I
10.3788/gzxb20194803.0314001
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
To eliminate the multi-beam interference, a binary and randomly distributed phase was introduced to the Fresnel lens array and a binary phase change of 0 or is applied to individual Fresnel lens. This change in phase disrupts the phases of the periodic beams, and therefore reduces the effect of multi-beam interference on the homogenized plane. The numerical simulation of the laser beam homogenization were carried out using the Fresnel lens with an aperture of 0.5 mm and the foci of 6 mm, and the array number of 20 x 20. The simulation results show that the overall uniformity of the target plane is calculated as 90% and the beams energy efficiency can be up to 96%. The designed Fresnel lens array was fabricated using microelectronic technologies. The measured uniformity of the homogenized laser beams at a wavelength of 1 064 nm was 83%, and the beams energy efficiency was 96%. Our results indicate that the introduction of the binary and randomly distributed phase to the periodic microlens array can effectively decrease the influence of interference and improve the uniformity of homogenization of single-mode Gaussian beams.
引用
收藏
页数:8
相关论文
共 15 条
  • [1] The Effects of Profile Errors of Microlens Surfaces on Laser Beam Homogenization
    Cao, Axiu
    Pang, Hui
    Wang, Jiazhou
    Zhang, Man
    Chen, Jian
    Shi, Lifang
    Deng, Qiling
    Hu, Song
    [J]. MICROMACHINES, 2017, 8 (02):
  • [2] Gao Yu-han, 2011, Optics and Precision Engineering, V19, P1464, DOI 10.3788/OPE.20111907.1464
  • [3] One-Dimensional Reflective Diffuser for Line Beam Shaper with Microlens Array Homogenizer
    Hsiao, Yung-Neng
    Wu, Hau-Ping
    Chen, Cheng-Huan
    Lin, Yu-Chung
    Lee, Min-Kai
    Liu, Sung-Ho
    [J]. OPTICAL REVIEW, 2014, 21 (05) : 715 - 718
  • [4] JIN Guo-fan, 1998, BINARY OPTICS, P89
  • [5] Jin Y H, 2015, Chinese Journal of Lasers, V42
  • [6] Efficient beamshaper homogenizer design combining diffractive optical elements, microlens array and random phase plate
    Kopp, C
    Ravel, L
    Meyrueis, P
    [J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 1999, 1 (03): : 398 - 403
  • [7] LIU Zhi-hui, 2011, CHINESE J LASERS, V43
  • [8] Improvement of Galilean refractive beam shaping system for accurately generating near-diffraction-limited flattop beam with arbitrary beam size
    Ma, Haotong
    Liu, Zejin
    Jiang, Pengzhi
    Xu, Xiaojun
    Du, Shaojun
    [J]. OPTICS EXPRESS, 2011, 19 (14): : 13105 - 13117
  • [9] PETER S, 2005, SPIE, V5912
  • [10] SHI Guang-yuan, 2011, ACTA PHOTONICA SINIC, V43, P139