共 50 条
- [2] A novel electrostatic actuator for micro deformable mirrors: Fabrication and test BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 488 - 491
- [4] Characterization of electrostatic micromembrane actuator performance using a mass probing method MICRO- AND NANOSYSTEMS, 2004, 782 : 95 - 100
- [5] Influence of inertial mass on rack and pinion actuator's damping characteristic Jilin Daxue Xuebao (Gongxueban)/Journal of Jilin University (Engineering and Technology Edition), 2019, 49 (03): : 881 - 887
- [8] Modeling and control of rotating eccentric mass block vibration damping electric actuator Zhendong Gongcheng Xuebao/Journal of Vibration Engineering, 2022, 35 (01): : 209 - 219