Fabrication of metal-oxide nano-hairs for effective index optical elements

被引：4
|
作者：
Srimathi, Indumathi Raghu [1 ]
Pung, Aaron J. [1 ]
Li, Yuan [1 ]
Rumpf, Raymond C. [2 ]
Johnson, Eric G. [1 ]
机构：
[1] Clemson Univ, Holcombe Dept Elect & Comp Engn, Ctr Opt Mat Sci & Engn Technol, Clemson, SC 29634 USA
[2] Univ Texas El Paso, EM Lab, WM Kreck Ctr Innovat 3D, El Paso, TX 79968 USA
来源：
OPTICS EXPRESS | 2013年 / 21卷 / 16期
关键词：
DESIGN; GRATINGS;
D O I：
10.1364/OE.21.018733
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a method for fabricating high aspect ratio metaloxide, sub-wavelength grating structures. These "nano-hair" structures are composed of alumina cylindrical pillars, partially embedded in a supporting fused silica substrate. The fabricated nano-hair structures demonstrate phase control of the transmitted beam while maintaining a peak transmitted power greater than 93% around a central wavelength of lambda(o) = 1.55 mu m. Based on this principle, discrete and continuous phase functions can be encoded by controlling the lithographic process. (c) 2013 Optical Society of America
引用
收藏
页码：18733 / 18741
页数：9
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