Polarization-independent waveguide grating coupler using an optimized polysilicon overlay

被引：3
|
作者：
Zhou, Xuetong [1 ]
Hu, Gaolei [1 ]
Qin, Yue [1 ]
Tsang, Hon Ki [1 ]
机构：
[1] Chinese Univ Hong Kong, Dept Elect Engn, Shatin, Hong Kong, Peoples R China
来源：
OPTICS LETTERS | 2022年 / 47卷 / 22期
关键词：
WAVELENGTH;
D O I：
10.1364/OL.471717
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We propose and validate a new, to the best of our knowledge, approach to designing a polarization-independent waveguide grating coupler, using an optimized polysilicon overlay on a silicon grating structure. Simulations predicted coupling efficiencies of about -3.6 dB and -3.5 dB for TE and TM polarizations, respectively. The devices were fabricated using photolithography in a multi-project wafer fabrication service by a commercial foundry and have measured coupling losses of -3.96 dB for TE polarization and -3.93 dB for TM polarization. (c) 2022 Optica Publishing Group
引用
收藏
页码：5825 / 5828
页数：4
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