[1] Univ Kebangsaan Malaysia, Inst Microengn & Nanoelect, Ukm Bangi 43600, Selangor, Malaysia
[2] Univ Tenaga Nas, Coll Engn, Kajang 43009, Malaysia
[3] Univ Kebangsaan Malaysia, Fac Sci & Technol, Sch Appl Phys, Bangi 43600, Malaysia
[4] STAIN Batusangkar, Fac Tarbiyah, Dept Phys Educ, Batusangkar 27213, Indonesia