A pulse-modulated nonequilibrium atmospheric-pressure microwave argon plasma discharge preionized by a kilohertz excited plasma jet

被引:20
|
作者
Li, Shou-Zhe [1 ]
Xu, Mao-Chun [1 ]
Zhang, Xin [1 ]
Zhang, Jialiang [1 ]
机构
[1] Dalian Univ Technol, Sch Phys & Optoelect Technol, Minist Educ, Key Lab Mat Modificat Laser, Dalian 116024, Peoples R China
关键词
WAVE-SUSTAINED DISCHARGE; THERMODYNAMIC-EQUILIBRIUM; EXCITATION; DEPARTURE; COLUMN; TORCH;
D O I
10.1063/1.4705433
中图分类号
O59 [应用物理学];
学科分类号
摘要
A pulse-modulated nonequilibrium atmospheric-pressure microwave argon surface wave plasma is generated by means of a preionization discharge with a single-electrode plasma jet driven by a power supply of 50 kHz. It is found that the electron induced Saha-like balance dominates excitation process in the plasma discharge through the electron temperature varying with the microwave input power and the applied voltage of kilohertz power supply. The microwave pulse-modulating effect on nonequilibrium characteristics of dual-frequency exciting argon surface wave plasma is studied by spectroscopic measurement of the excitation temperature and gas temperature. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4705433]
引用
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页数:4
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