Atomic Force Microscope nanolithography on titanium: Influence of the anodic voltage waveform. on the formation of oxide nanodots

被引：1

作者：

Kim, Tae Young ^{[1
]}

Di Zitti, Ermanno ^{[1
]}

Ricci, Davide ^{[1
,2
]}

Cincotti, Silvano ^{[1
]}

机构：

[1] Univ Genoa, Dipartimento Ingn Biofis & Elettron, I-16145 Genoa, Italy

[2] IIT, I-16163 Genoa, Italy

来源：

SUPERLATTICES AND MICROSTRUCTURES | 2008年 / 44卷 / 4-5期

关键词：

Atomic force microscope (AFM); Local anodic oxidation; Nanolithography; Titanium oxide nanodots;

D O I：

10.1016/j.spmi.2008.02.012

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We investigate the effect of different voltage waveforms on the growth of titanium oxide nanodots using Atomic Force Microscope (AFM) nanolithography. The resulting oxide features are compared by taking into account the current data detected during oxidation under the application of constant and linear ramp voltages. The experimental analysis of current waveforms during oxidation upon a constant bias voltage gives quantitative criteria to reduce space charge effects. The use of ramp voltages gives higher flexibility on the control of volume and aspect ratio of oxide features by varying the duty cycle. (c) 2008 Elsevier Ltd. All rights reserved.

引用

页码：670 / 676

页数：7

共 29 条

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