FTIR studies of Si-SiO2 interface structure and growth.

被引:0
|
作者
Queeney, K [1 ]
Weldon, MK [1 ]
Chabal, YJ [1 ]
Stefanov, BB [1 ]
Raghavachari, K [1 ]
机构
[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
关键词
D O I
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
216-COLL
引用
收藏
页码:U462 / U462
页数:1
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