Surface Image Processing Algorithms in Scanning Probe Microscopy and Nanohardness Measurements

被引:0
|
作者
Lvova, N. [1 ]
Shirokov, I. [2 ]
Useinov, A. [1 ]
Gogolinskiy, K. [1 ]
机构
[1] FSI TISNCM, 7a Centralnaya St, Troitsk 142190, Moscow Region, Russia
[2] Lomonosov Moscow State Univ, Fac Computat Math & Cybernet, Moscow, Russia
关键词
Image processing; scanning probe microscopy; nanohardness tester; scratch tester; HARDNESS;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
Algorithms for automatic analysis of the geometrical parameters of surface images obtained by scanning probe microscopy have been developed. The algorithms include calibration of linear displacements of the scanners using the image of the periodic linear reference samples (calibrating grids); calculation of the grain size distribution for nanostructured materials; the analysis of the geometrical parameters of the imprints and traces left after the surface deformation during scratch test and indentation. The descriptions of the algorithms are presented. The experimental data presented demonstrate the performance of the software modules based on the proposed algorithms.
引用
收藏
页码:1577 / 1582
页数:6
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