Design of A Resonant Accelerometer

A resonant accelerometer was designed in order to overcome low output precision characteristics of the sensors which were tested with analog signals. This accelerator has the advantages of good repeatability, high resolution and excellent stability. Relationship between linear acceleration and resonant frequency of the sensing unit was deduced and the finite element method was used to simulate the correctness of the design. The theoretical and simulation results are 2984.47 Hz and 2971.27 Hz respectively without acceleration applied on this sensor. When 1g acceleration applied on this sensor, the theoretical and simulation results are 2970.18 Hz and 2951.78 Hz. The relative errors are 0.44% and 0.62% respectively. Finally, the fabricated sensor was tested, and the measured resonant frequency is 3022.55 Hz with a relative error 1.26%, and we give out the possible reasons for this error. The results indicate that this design is feasible.