Resonance-based Addressing in Laminate MEMS Devices

This paper reports on an electromagnetically actuated MEMS cantilever device that is triggered using an oscillating signal which sends the device into resonance. At resonance, a moving magnetic cantilever is driven to large amplitudes, allowing it to be driven far enough to latch against a magnetic pad. Since the device is driven at resonance, it can be combined with other devices that have different resonances, thereby allowing a single signal line to trigger more than one device by simply changing the driving frequency. This allows the device to be addressed using a single address line that carries multiple frequencies. These devices can be used in any application requiring two state mechanical actuators, such as electrical switches, micro-mirrors, or micro-valves. The device is fabricated using laminate technology, commonly found in packaging or printed circuit board facilities, allowing low cost manufacturing and straightforward integration into electronic modules such as antennas or phase-shifters.