Growth and characteristics of InGaN MQWs on GaN microstructures by selective MOCVD

被引:0
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作者
Kim, CS [1 ]
Hong, YK
Kim, KS
Hong, CH
Yang, GM
Lim, KY
Lee, HJ
Kim, MH
机构
[1] Chonbuk Natl Univ, Dept Semicond Sci & Technol, Chonju 561756, South Korea
[2] Chonbuk Natl Univ, Semicond Phys Res Ctr, Chonju 561756, South Korea
[3] LG Elect Inst Technol, Device & Mat Lab, Dept OE Team, Seoul 137724, South Korea
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中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We have studied the formation of GaN hexagonal microstructures its a function of growth parameters such as growth pressures, growth temperatures and fill factors and fabricated blue InGaN multiquantum well(MQW) structures on these GaN microstructures by selective metal-organic chemical vapor deposition(MOCVD) with dot-patterned mask. The shapes of these GaN microstructures were strongly related to the formation of the self-limited (0001) facet with various growth conditions, which affect the Ga-diffusion length. In case of InGaN MQW's structures grown on the GaN hexagonal microstructures, blue emission was obtained from six (1-101) facets as well. as the flat (0001) facet, while yellow luminescence was strongly observed at lateral overgrown region through the six (1-101) side walls.
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页码:S205 / S209
页数:5
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