Ultra-Sensitive Strain Sensor Based on Flexible Poly(vinylidene fluoride) Piezoelectric Film

被引:46
|
作者
Lu, Kai [1 ,2 ]
Huang, Wen [1 ]
Guo, Junxiong [1 ]
Gong, Tianxun [1 ]
Wei, Xiongbang [1 ]
Lu, Bing-Wei [3 ]
Liu, Si-Yi [3 ]
Yu, Bin [4 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Sichuan, Peoples R China
[2] South China Univ Technol, State Key Lab Luminescent Mat & Devices, Guangzhou 510006, Guangdong, Peoples R China
[3] Tsinghua Univ, Dept Engn Mech, AML, Beijing 100084, Peoples R China
[4] SUNY Albany, CNSE, Albany, NY 12203 USA
来源
基金
中国国家自然科学基金;
关键词
Piezoelectricity; PVDF film; Tactile pressure; Flexible sensor; PRESSURE SENSOR; MASSAGE; PVDF; PAIN;
D O I
10.1186/s11671-018-2492-7
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A flexible 4 x 4 sensor array with 16 micro-scale capacitive units has been demonstrated based on flexible piezoelectric poly(vinylidene fluoride) (PVDF) film. The piezoelectricity and surface morphology of the PVDF were examined by optical imaging and piezoresponse force microscopy (PFM). The PFM shows phase contrast, indicating clear interface between the PVDF and electrode. The electro-mechanical properties show that the sensor exhibits excellent output response and an ultra-high signal-to-noise ratio. The output voltage and the applied pressure possess linear relationship with a slope of 12 mV/kPa. The hold-and-release output characteristics recover in less than 2.5 mu s, demonstrating outstanding electromechanical response. Additionally, signal interference between the adjacent arrays has been investigated via theoretical simulation. The results show the interference reduces with decreasing pressure at a rate of 0.028 mV/kPa, highly scalable with electrode size and becoming insignificant for pressure level under 178 kPa.
引用
收藏
页数:6
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