HYBRID ULTRA THIN SILICON AND ELECTRO-OPTIC POLYMER WAVEGUIDE MODULATOR

被引：0
|
作者：
Inoue, Yukinori [1 ]
Miura, Hiroki [1 ]
Yokoyama, Shiyoshi [1 ,2 ]
机构：
[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, 6-1 Kasuga Kouen, Kasuga, Fukuoka 8168580, Japan
[2] Kyushu Univ, Inst Mat Chem & Engn, Kasuga, Fukuoka, Japan
来源：
2017 22ND MICROOPTICS CONFERENCE (MOC) | 2017年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Compact and, low driving voltage optical modulator is the key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon core and planar electrodes to enable the modulator a low driving voltage.
引用
收藏
页码：302 / 303
页数：2
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