Extremely bendable thin-film encapsulation of organic light-emitting diodes

被引：56
|
作者：
Seo, Seung-Woo [1 ]
Chae, Heeyeop [1 ]
Seo, Sang Joon [2 ]
Chung, Ho Kyoon [2 ]
Cho, Sung Min [1 ]
机构：
[1] Sungkyunkwan Univ, Sch Chem Engn, Suwon 440746, South Korea
[2] SKKU Adv Inst Nanotechnol SAINT, Suwon 440746, South Korea
来源：
APPLIED PHYSICS LETTERS | 2013年 / 102卷 / 16期
关键词：
ATOMIC LAYER DEPOSITION; GAS-DIFFUSION BARRIERS; POLYMERS;
D O I：
10.1063/1.4803066
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on an extremely bendable moisture barrier for the thin-film encapsulation of organic light-emitting diodes (OLEDs). Hybrid barriers with various dyads of alternating aluminum oxide (Al2O3) and plasma-polymerized layers, which are utilizable for the thin-film encapsulation of flexible OLEDs, were prepared by atomic layer deposition and plasma chemical vapor deposition, respectively. When the total thickness of Al2O3 was fixed at 20 nm, an ultimate 200-dyad multilayer barrier showed change of less than 20% in water vapor transmission rate from its initial value of the order of 10(-4) g/m(2)/day, even after 10 000 times of bending with a bending radius of 5 mm. (C) 2013 AIP Publishing LLC [http://dx.doi.org/10.1063/1.4803066]
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页数：4
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