Research of Control System Platform Technology for IC Equipment

被引：0

作者：

Liu, Mingzhe ^{[1
]}

Xu, Aidong ^{[1
]}

Yu, Haibin ^{[1
]}

Wang, Hong ^{[1
]}

机构：

[1] Chinese Acad Sci, Shenyang Inst Automat, Shenyang 110016, Peoples R China

来源：

2008 7TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION, VOLS 1-23 | 2008年

关键词：

integrate circuit; control system; semiconductor; SEMI;

D O I：

10.1109/WCICA.2008.4594070

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

With the development of road to 300mm semiconductor wafer manufacturing, IC equipment control system not only implement its task scheduling, material transfer and process control, we must also consider the enterprise information integration, production scheduling and industry standards. This paper analyzes the semiconductor manufacturing process, control requirements, and presents a framework-style, modular IC equipment control system platform model, aimed at the complete system control functions at the same time, making the control of the semiconductor equipment greater flexibility, scalability, enterprise-class interactive capabilities, and in accordance with industry standards.

引用

页码：7393 / 7397

页数：5