High-resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform

被引：5

作者：

Huang, H-L ^{[2
]}

Liu, C-H ^{[3
]}

Jywe, W-Y ^{[1
]}

Wang, M-S ^{[2
]}

机构：

[1] Natl Formosa Univ, Dept Automat Engn, Huwei 632, Yunlin, Taiwan

[2] Natl Cheng Kung Univ, Dept Engn Sci, Tainan 70101, Taiwan

[3] Natl Formosa Univ, Inst Electroopt & Mat Engn, Huwei 632, Yunlin, Taiwan

来源：

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE | 2009年 / 223卷 / 01期

关键词：

three degrees of freedom; quadrant detector; polarization interference;

D O I：

10.1243/09544054JEM1190

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, a high-resolution three-degrees-of-freedom (3-DOF) motion error measuring system based on interference is described. it can simultaneously measure the linear displacement and two angular errors of a single-axis linear moving platform. The displacement is measured using a polarization interference technique and the two angular errors are also measured based on the geometry optical theorem. The verification results show that the resolution is about 20 nm. The 3-DOF measurement system detected displacements relative to a measurement mirror move with an accuracy of about +/- 8 mu m for a measuring range of 50 mm, and detected the angular errors with a related accuracy of about +/- 2 arc sec for a measuring range of +/- 100 arc sec.

引用

页码：107 / 114

页数：8

共 22 条

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