共 50 条
- [1] Radio-frequency optomechanical characterization of a silicon nitride drum Scientific Reports, 10
- [5] Refractive index control of silicon nitride films prepared by radio-frequency reactive sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (06): : 2137 - 2139
- [6] Subharmonics radio-frequency division in chip-scale optomechanical oscillators 2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2015,
- [8] Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides 2018 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2018, : 18 - 19
- [9] STUDY ON RADIO-FREQUENCY REACTIVE SPUTTERING DEPOSITION OF SILICON-NITRIDE THIN-FILMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (03): : 462 - 467
- [10] CHARACTERIZATION OF RADIO-FREQUENCY UNBALANCED MAGNETRONS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (05): : 3300 - 3304